Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9372412 | Lithographic apparatus and device manufacturing method | Erwin John Van Zwet, Pieter Willem Herman De Jager, Erik Fritz | 2016-06-21 |
| 9335638 | Lithographic apparatus, programmable patterning device and lithographic method | Pieter Willem Herman De Jager, Vadim Yevgenyevich Banine, Jozef Petrus Henricus Benschop, Cheng-Qun Gui, Erwin John Van Zwet | 2016-05-10 |
| 9316926 | Lithographic apparatus and device manufacturing method | Erwin John Van Zwet, Pieter Willem Herman De Jager, Hendrik De Man | 2016-04-19 |
| 9235140 | Lithographic apparatus and device manufacturing method | Erwin John Van Zwet, Pieter Willem Herman De Jager, Erik Fritz | 2016-01-12 |