Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9310700 | Lithography method and apparatus | Adrianus Hendrik Koevoets, Sander Frederik Wuister | 2016-04-12 |
| 9304401 | Measurement of the position of a radiation beam spot in lithography | Felix Godfried Peter Peeters, Jozef Petrus Henricus Benschop, Gregor Edward Van Baars, Jeroen Dekkers | 2016-04-05 |