Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9488921 | Lithography apparatus, an apparatus for providing setpoint data, a device manufacturing method, a method of calculating setpoint data and a computer program | Patricius Aloysius Jacobus Tinnemans | 2016-11-08 |
| 9482963 | Method of controlling a patterning device in a lithographic apparatus, device manufacturing method and lithographic apparatus | Pieter Willem Herman De Jager, Erwin John Van Zwet | 2016-11-01 |