Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9488465 | Level sensor, a method for determining a height map of a substrate using a selected resolution, and a lithographic apparatus | Laurent Khuat Duy, Martinus Cornelis Reijnen, Erik Johan Koop | 2016-11-08 |
| 9229340 | Lithographic apparatus | Engelbertus Antonius Fransiscus Van Der Pasch, Joost Jeroen Ottens, Emiel Jozef Melanie Eussen, Johannes Henricus Wilhelmus Jacobs, William Peter Van Drent +2 more | 2016-01-05 |