Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9488465 | Level sensor, a method for determining a height map of a substrate using a selected resolution, and a lithographic apparatus | Laurent Khuat Duy, Lukasz Jerzy Macht, Erik Johan Koop | 2016-11-08 |