Issued Patents 2016
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9482962 | Lithographic apparatus and device manufacturing method | Christiaan Alexander Hoogendam, Bob Streefkerk, Johannes Catharinus Hubertus Mulkens, Erik Theodorus Maria Bijlaart, Aleksey Yurievich Kolesnychenko +4 more | 2016-11-01 |
| 9465301 | Lithographic apparatus and device manufacturing method | Aleksey Yurievich Kolesnychenko | 2016-10-11 |
| 9396854 | Process and apparatus for removing gaseous contaminants from gas stream comprising gaseous contaminants | Henricus Abraham Geers | 2016-07-19 |
| 9366972 | Lithographic apparatus and device manufacturing method | Joeri Lof, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +9 more | 2016-06-14 |
| 9341944 | Imprint lithography | Aleksey Yurievich Kolesnychenko, Yvonne Wendela Kruijt-Stegeman | 2016-05-17 |