Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9454084 | Method to determine the usefulness of alignment marks to correct overlay, and a combination of a lithographic apparatus and an overlay measurement system | Irina Lyulina, Remi Daniel Marie Edart, Antoine Gaston Marie Kiers, Michael Kubis | 2016-09-27 |
| 9377700 | Determining position and curvature information directly from a surface of a patterning device | Mark Josef Schuster, Santiago del Puerto, Daniel Nathan Burbank, Duncan Walter Bromley | 2016-06-28 |
| 9280057 | Alignment measurement system, lithographic apparatus, and a method to determine alignment of in a lithographic apparatus | David Deckers, Sami Musa | 2016-03-08 |