Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9377700 | Determining position and curvature information directly from a surface of a patterning device | Mark Josef Schuster, Daniel Nathan Burbank, Duncan Walter Bromley, Franciscus Godefridus Casper Bijnen | 2016-06-28 |
| 9229341 | Reticle support that reduces reticle slippage | Enrico Zordan | 2016-01-05 |