Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9335621 | Lithographic apparatus with an object support having actuating structures to apply a force and method for operating the same | — | 2016-05-10 |
| 9274439 | Reticle clamping system | — | 2016-03-01 |
| 9229341 | Reticle support that reduces reticle slippage | Santiago del Puerto | 2016-01-05 |