Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9395633 | Lithographic cluster system, method for calibrating a positioning device of a lithographic apparatus | Alexander Alexandrovich Danilin, Alejandro Xabier Arrizabalaga Uriarte, Alexander Padiy | 2016-07-19 |
| 9310698 | Method and apparatus for controlling a lithographic apparatus | Alexander Padiy | 2016-04-12 |
| 9268242 | Lithographic apparatus and device manufacturing method involving a heater and a temperature sensor | Theodorus Petrus Maria Cadee, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Erik Roelof Loopstra, Aschwin Lodewijk Hendricus Johannes Vermeer +20 more | 2016-02-23 |