Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9382621 | Ground return for plasma processes | Soo Young Choi, Robin L. Tiner, Shinichi Kurita, John M. White, Carl A. Sorensen +3 more | 2016-07-05 |
| 9324597 | Vertical inline CVD system | Shinichi Kurita, Jozef Kudela, Suhail Anwar, John M. White, Dong-Kil Yim +3 more | 2016-04-26 |