Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9496190 | Feedback of layer thickness timing and clearance timing for polishing control | Kun Xu, Feng Q. Liu, Dominic J. Benvegnu, Boguslaw A. Swedek, Yuchun Wang +1 more | 2016-11-15 |