MH

Michael Heiden

VG Vistec Semiconductor Systems Gmbh: 8 patents #1 of 13Top 8%
📍 Blieskastel, MI: #1 of 1 inventorsTop 100%
Overall (2011): #4,350 of 364,097Top 2%
9
Patents 2011

Issued Patents 2011

Showing 1–9 of 9 patents

Patent #TitleCo-InventorsDate
D644289 Decorative deerskin arrowhead 2011-08-30
7986409 Method for determining the centrality of masks 2011-07-26
7978340 System and method for determining positions of structures on a substrate Hans-Artur Boesser, Wolfgang Fricke 2011-07-12
7961334 Coordinate measuring machine for measuring structures on a substrate Hans-Artur Boesser, Klaus-Dieter Adam 2011-06-14
7939789 Method for reproducibly determining geometrical and/or optical object characteristics Klaus Rinn, Andreas Schaaf 2011-05-10
7929149 Coordinate measuring machine and a method for correcting non-linearities of the interferometers of a coordinate measuring machine 2011-04-19
7903259 Device for determining the position of at least one structure on an object, use of an illumination apparatus with the device and use of protective gas with the device 2011-03-08
7889338 Coordinate measuring machine and method for structured illumination of substrates 2011-02-15
7864319 Device and method for determining an optical property of a mask Hans-Artur Boesser, Klaus Rinn, Frank Laske 2011-01-04