Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7939789 | Method for reproducibly determining geometrical and/or optical object characteristics | Michael Heiden, Andreas Schaaf | 2011-05-10 |
| 7864319 | Device and method for determining an optical property of a mask | Hans-Artur Boesser, Michael Heiden, Frank Laske | 2011-01-04 |