Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7982950 | Measuring system for structures on a substrate for semiconductor manufacture | Walter Steinberg | 2011-07-19 |
| 7978340 | System and method for determining positions of structures on a substrate | Wolfgang Fricke, Michael Heiden | 2011-07-12 |
| 7961334 | Coordinate measuring machine for measuring structures on a substrate | Michael Heiden, Klaus-Dieter Adam | 2011-06-14 |
| 7864319 | Device and method for determining an optical property of a mask | Michael Heiden, Klaus Rinn, Frank Laske | 2011-01-04 |