Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7961334 | Coordinate measuring machine for measuring structures on a substrate | Hans-Artur Boesser, Michael Heiden | 2011-06-14 |
| 7948635 | Method for determining positions of structures on a substrate | Katrin Pietsch, Tillmann Ehrenberg | 2011-05-24 |
| 7872763 | Device for measuring the position of at least one structure on a substrate | Katrin Pietsch, Tillmann Ehrenberg | 2011-01-18 |