Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7948635 | Method for determining positions of structures on a substrate | Klaus-Dieter Adam, Tillmann Ehrenberg | 2011-05-24 |
| 7872763 | Device for measuring the position of at least one structure on a substrate | Klaus-Dieter Adam, Tillmann Ehrenberg | 2011-01-18 |