Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7864319 | Device and method for determining an optical property of a mask | Hans-Artur Boesser, Michael Heiden, Klaus Rinn | 2011-01-04 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7864319 | Device and method for determining an optical property of a mask | Hans-Artur Boesser, Michael Heiden, Klaus Rinn | 2011-01-04 |