MK

Masashi Kubo

UL Ulvac: 1 patents #23 of 85Top 30%
Overall (2011): #225,617 of 364,097Top 65%
1
Patents 2011

Issued Patents 2011

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
8011315 Thin film forming apparatus Takafumi Matsumoto, Shun Mikami, Kouichi Hanzawa, Mineharu Moriya, Hideyuki Odagi +2 more 2011-09-06