Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8011315 | Thin film forming apparatus | Shun Mikami, Kouichi Hanzawa, Mineharu Moriya, Hideyuki Odagi, Tetsuya Shimada +2 more | 2011-09-06 |
| 7927472 | Optical film thickness controlling method, optical film thickness controlling apparatus, dielectric multilayer film manufacturing apparatus, and dielectric multilayer film manufactured using the same controlling apparatus or manufacturing apparatus | Haruo Takahashi, Kouichi Hanzawa | 2011-04-19 |