SM

Shun Mikami

UL Ulvac: 1 patents #23 of 85Top 30%
Overall (2011): #166,834 of 364,097Top 50%
1
Patents 2011

Issued Patents 2011

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
8011315 Thin film forming apparatus Takafumi Matsumoto, Kouichi Hanzawa, Mineharu Moriya, Hideyuki Odagi, Tetsuya Shimada +2 more 2011-09-06