MM

Mineharu Moriya

UL Ulvac: 1 patents #23 of 85Top 30%
Overall (2011): #212,920 of 364,097Top 60%
1
Patents 2011

Issued Patents 2011

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
8011315 Thin film forming apparatus Takafumi Matsumoto, Shun Mikami, Kouichi Hanzawa, Hideyuki Odagi, Tetsuya Shimada +2 more 2011-09-06