Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8011315 | Thin film forming apparatus | Takafumi Matsumoto, Shun Mikami, Kouichi Hanzawa, Mineharu Moriya, Tetsuya Shimada +2 more | 2011-09-06 |
| 7967961 | Film forming apparatus | Minoru Dogi, Tetsuya Shimada, Masahiro Matsumoto | 2011-06-28 |