YO

Yoshinobu Ooya

TL Tokyo Electron Limited: 1 patents #261 of 712Top 40%
Overall (2011): #122,086 of 364,097Top 35%
1
Patents 2011

Issued Patents 2011

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
7988816 Plasma processing apparatus and method Akira Koshiishi, Masaru Sugimoto, Kunihiko Hinata, Noriyuki Kobayashi, Chishio Koshimizu +11 more 2011-08-02