Issued Patents 2011
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8069020 | Generating simulated diffraction signal using a dispersion function relating process parameter to dispersion | Hanyou Chu | 2011-11-29 |
| 7990534 | System and method for azimuth angle calibration | — | 2011-08-02 |
| 7961306 | Optimizing sensitivity of optical metrology measurements | Adam E. Norton, Manuel Madriaga | 2011-06-14 |
| 7949490 | Determining profile parameters of a structure using approximation and fine diffraction models in optical metrology | Wei Liu, Weidong Yang | 2011-05-24 |
| 7940391 | Pre-aligned metrology system and modules | — | 2011-05-10 |
| 7912679 | Determining profile parameters of a structure formed on a semiconductor wafer using a dispersion function relating process parameter to dispersion | Hanyou Chu | 2011-03-22 |