Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7949490 | Determining profile parameters of a structure using approximation and fine diffraction models in optical metrology | Shifang Li, Weidong Yang | 2011-05-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7949490 | Determining profile parameters of a structure using approximation and fine diffraction models in optical metrology | Shifang Li, Weidong Yang | 2011-05-24 |