Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8069020 | Generating simulated diffraction signal using a dispersion function relating process parameter to dispersion | Shifang Li | 2011-11-29 |
| 7912679 | Determining profile parameters of a structure formed on a semiconductor wafer using a dispersion function relating process parameter to dispersion | Shifang Li | 2011-03-22 |