Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8030631 | Apparatus for controlling angle of incidence of multiple illumination beams | Xinkang Tian | 2011-10-04 |
| 8030632 | Controlling angle of incidence of multiple-beam optical metrology tools | Xinkang Tian | 2011-10-04 |
| 7961306 | Optimizing sensitivity of optical metrology measurements | Shifang Li, Manuel Madriaga | 2011-06-14 |
| 7924422 | Calibration method for optical metrology | Fred E. Stanke, Holger Tuitje | 2011-04-12 |