Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8030631 | Apparatus for controlling angle of incidence of multiple illumination beams | Adam E. Norton | 2011-10-04 |
| 8030632 | Controlling angle of incidence of multiple-beam optical metrology tools | Adam E. Norton | 2011-10-04 |
| 7948630 | Auto focus of a workpiece using two or more focus parameters | Norton Adam | 2011-05-24 |