Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7961306 | Optimizing sensitivity of optical metrology measurements | Shifang Li, Adam E. Norton | 2011-06-14 |
| 7949618 | Training a machine learning system to determine photoresist parameters | Joerg Bischoff, David Hetzer | 2011-05-24 |