Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8038838 | Spin head, method of operating the spin head and apparatus for treating substrates with the spin head | Ju Won Kim, Ki Hoon CHOI, Jung Keun Cho, Jung Bong Choi | 2011-10-18 |
| 7934513 | Facility with multi-storied process chamber for cleaning substrates and method for cleaning substrates using the facility | Joung-Hyeon Lim, Jung Keun Cho, In-Ho Bang, Woo Young Kim, Man Seok Oh +1 more | 2011-05-03 |
| 7918910 | Unit for eliminating particles and apparatus for transferring a substrate having the same | Young-Ki Ahn, Jae-Jeong Jeong, Bo Ram Chan Sung | 2011-04-05 |
| 7900853 | Apparatus for supplying chemical liquid | Si Eun Kim, Keun-Young Park | 2011-03-08 |