Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8038838 | Spin head, method of operating the spin head and apparatus for treating substrates with the spin head | Ju Won Kim, Ki Hoon CHOI, Kyo-Woog Koo, Jung Bong Choi | 2011-10-18 |
| 7934513 | Facility with multi-storied process chamber for cleaning substrates and method for cleaning substrates using the facility | Joung-Hyeon Lim, Kyo-Woog Koo, In-Ho Bang, Woo Young Kim, Man Seok Oh +1 more | 2011-05-03 |
| 7866058 | Spin head and substrate treating method using the same | Hyun Jong Kim, Ju Won Kim | 2011-01-11 |
| 7862765 | Method for synthesizing conductive composite | Ho-Soo Hwang | 2011-01-04 |