Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8038838 | Spin head, method of operating the spin head and apparatus for treating substrates with the spin head | Ju Won Kim, Jung Keun Cho, Kyo-Woog Koo, Jung Bong Choi | 2011-10-18 |