Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7934513 | Facility with multi-storied process chamber for cleaning substrates and method for cleaning substrates using the facility | Joung-Hyeon Lim, Jung Keun Cho, Kyo-Woog Koo, Woo Young Kim, Man Seok Oh +1 more | 2011-05-03 |