Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8015986 | Apparatus for cleaning substrate and method for cleaning substrate | — | 2011-09-13 |
| 7918910 | Unit for eliminating particles and apparatus for transferring a substrate having the same | Jae-Jeong Jeong, Bo Ram Chan Sung, Kyo-Woog Koo | 2011-04-05 |