Issued Patents 2011
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8084366 | Modified DARC stack for resist patterning | Michael Chan | 2011-12-27 |
| 8071475 | Liner for tungsten/silicon dioxide interface in memory | Yoichiro Tanaka, Steven J. Radigan | 2011-12-06 |
| 8008187 | Method for reducing dielectric overetch using a dielectric etch stop at a planar surface | Samuel V. Dunton, Christopher J. Petti | 2011-08-30 |
| 7955515 | Method of plasma etching transition metal oxides | Michael Konevecki | 2011-06-07 |
| 7915164 | Method for forming doped polysilicon via connecting polysilicon layers | Michael Konevecki, Maitreyee Mahajani, Sucheta Nallamothu, Andrew J. Walker, Tanmay Kumar | 2011-03-29 |
| 7915163 | Method for forming doped polysilicon via connecting polysilicon layers | Michael Konevecki, Maitreyee Mahajani, Sucheta Nallamothu, Andrew J. Walker, Tanmay Kumar | 2011-03-29 |
| 7906392 | Pillar devices and methods of making thereof | Vance Dunton, S. Brad Herner, Paul Wai Kie Poon, Chuanbin Pan, Michael Chan +1 more | 2011-03-15 |