Issued Patents 2011
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8084347 | Resist feature and removable spacer pitch doubling patterning method for pillar structures | Yung-Tin Chen | 2011-12-27 |
| 8080443 | Method of making pillars using photoresist spacer mask | Yung-Tin Chen, Chun-Ming Wang | 2011-12-20 |
| 8071475 | Liner for tungsten/silicon dioxide interface in memory | Yoichiro Tanaka, Usha Raghuram | 2011-12-06 |
| 8026178 | Patterning method for high density pillar structures | Natalie Nguyen, Paul Wai Kie Poon, Michael Konevecki, Yung-Tin Chen, Raghuveer S. Makala +1 more | 2011-09-27 |
| 8018025 | Nonvolatile memory cell comprising a reduced height vertical diode | S. Brad Herner | 2011-09-13 |
| 7994068 | Method for fabricating a 3-D integrated circuit using a hard mask of silicon-oxynitride on amorphous carbon | Michael Konevecki | 2011-08-09 |
| 7982273 | Masking of repeated overlay and alignment marks to allow reuse of photomasks in a vertical structure | Yung-Tin Chen, Christopher J. Petti, Tanmay Kumar | 2011-07-19 |
| 7968277 | Imaging post structures using X and Y dipole optics and a single mask | Yung-Tin Chen, Paul Wai Kie Poon, Michael Konevecki | 2011-06-28 |
| 7935553 | Method for fabricating high density pillar structures by double patterning using positive photoresist | Roy E. Scheuerlein | 2011-05-03 |
| 7927977 | Method of making damascene diodes using sacrificial material | Raghuveer S. Makala, Vance Dunton, Yoichiro Tanaka, Steven Maxwell, Tong Zhang | 2011-04-19 |
| 7923305 | Patterning method for high density pillar structures | Natalie Nguyen, Paul Wai Kie Poon, Michael Konevecki, Yung-Tin Chen | 2011-04-12 |