Issued Patents 2011
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8026178 | Patterning method for high density pillar structures | Natalie Nguyen, Paul Wai Kie Poon, Steven J. Radigan, Yung-Tin Chen, Raghuveer S. Makala +1 more | 2011-09-27 |
| 7994068 | Method for fabricating a 3-D integrated circuit using a hard mask of silicon-oxynitride on amorphous carbon | Steven J. Radigan | 2011-08-09 |
| 7968277 | Imaging post structures using X and Y dipole optics and a single mask | Yung-Tin Chen, Steven J. Radigan, Paul Wai Kie Poon | 2011-06-28 |
| 7955515 | Method of plasma etching transition metal oxides | Usha Raghuram | 2011-06-07 |
| 7923305 | Patterning method for high density pillar structures | Natalie Nguyen, Paul Wai Kie Poon, Steven J. Radigan, Yung-Tin Chen | 2011-04-12 |
| 7915164 | Method for forming doped polysilicon via connecting polysilicon layers | Usha Raghuram, Maitreyee Mahajani, Sucheta Nallamothu, Andrew J. Walker, Tanmay Kumar | 2011-03-29 |
| 7915163 | Method for forming doped polysilicon via connecting polysilicon layers | Usha Raghuram, Maitreyee Mahajani, Sucheta Nallamothu, Andrew J. Walker, Tanmay Kumar | 2011-03-29 |
| 7906392 | Pillar devices and methods of making thereof | Vance Dunton, S. Brad Herner, Paul Wai Kie Poon, Chuanbin Pan, Michael Chan +1 more | 2011-03-15 |