Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8084366 | Modified DARC stack for resist patterning | Usha Raghuram | 2011-12-27 |
| 7981592 | Double patterning method | — | 2011-07-19 |
| 7973407 | Three-dimensional stacked substrate arrangements | Shriram Ramanathan, Patrick Morrow, Scott List, Mauro J. Kobrinsky, Sarah Kim +3 more | 2011-07-05 |
| 7906392 | Pillar devices and methods of making thereof | Vance Dunton, S. Brad Herner, Paul Wai Kie Poon, Chuanbin Pan, Michael Konevecki +1 more | 2011-03-15 |