Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8018077 | Electromechanical system having a controlled atmosphere, and method of fabricating same | Aaron Partridge, Markus Lutz | 2011-09-13 |
| 7898046 | Microelectromechanical systems encapsulation process | Markus Ulm, Brian Stark, Matthias Metz, Tino Fuchs, Franz Laermer | 2011-03-01 |