Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8020266 | Method of producing a device | Markus Ulm, Matthias Metz | 2011-09-20 |
| 7898046 | Microelectromechanical systems encapsulation process | Markus Ulm, Matthias Metz, Tino Fuchs, Franz Laermer, Silvia Kronmueller | 2011-03-01 |