Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7898046 | Microelectromechanical systems encapsulation process | Markus Ulm, Brian Stark, Matthias Metz, Franz Laermer, Silvia Kronmueller | 2011-03-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7898046 | Microelectromechanical systems encapsulation process | Markus Ulm, Brian Stark, Matthias Metz, Franz Laermer, Silvia Kronmueller | 2011-03-01 |