Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8040023 | Bending transducer for generating electrical energy from mechanical deformations | Thorsten Pannek, Ralf Reichenbach, Marian Keck | 2011-10-18 |
| 7898046 | Microelectromechanical systems encapsulation process | Markus Ulm, Brian Stark, Matthias Metz, Tino Fuchs, Silvia Kronmueller | 2011-03-01 |
| 7872333 | Layer system comprising a silicon layer and a passivation layer, method for production a passivation layer on a silicon layer and the use of said system and method | Lutz Mueller, Winfried Bernhard | 2011-01-18 |