Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8018077 | Electromechanical system having a controlled atmosphere, and method of fabricating same | Aaron Partridge, Silvia Kronmueller | 2011-09-13 |
| 7923278 | Integrated getter area for wafer level encapsulated microelectromechanical systems | Aaron Partridge | 2011-04-12 |
| 7907027 | Frequency and/or phase compensated microelectromechanical oscillator | Aaron Partridge | 2011-03-15 |
| 7907035 | MEMS resonator array structure and method of operating and using same | Zhiyu Pan, Aaron Partridge | 2011-03-15 |