Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7933016 | Apparatus and methods for detecting overlay errors using scatterometry | Walter D. Mieher, Ady Levy, Boris Golovanevsky, Michael Friedmann, Ian Smith +10 more | 2011-04-26 |
| 7884321 | Method and system for non-destructive distribution profiling of an element in a film | Bruno W. Schueler, David A. Reed, Michael Kwan, David S. Ballance | 2011-02-08 |