Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8084356 | Methods of low-K dielectric and metal process integration | Yezdi Dordi | 2011-12-27 |
| 7905982 | Antenna for plasma processor apparatus | Andras Kuthi | 2011-03-15 |
| 7884017 | Thermal methods for cleaning post-CMP wafers | Zhonghui Wang, Tiruchirapalli Arunagiri, Fritz Redeker, Yezdi Dordi, John M. Boyd +3 more | 2011-02-08 |