Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8066895 | Method to control uniformity using tri-zone showerhead | Rodolfo P. Belen, Edward P. Hammond, IV, Brian K. Hatcher, Dan Katz, Valentin N. Todorow | 2011-11-29 |
| 8017526 | Gate profile control through effective frequency of dual HF/VHF sources in a plasma etch process | Edward P. Hammond, IV, Rodolfo P. Belen, Brian K. Hatcher, Valentin N. Todorow, Dan Katz | 2011-09-13 |
| 7879250 | Method of processing a workpiece in a plasma reactor with independent wafer edge process gas injection | Dan Katz, David Palagashvili, Michael D. Willwerth, Valentin N. Todorow | 2011-02-01 |