Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8066895 | Method to control uniformity using tri-zone showerhead | Edward P. Hammond, IV, Brian K. Hatcher, Dan Katz, Alexander Paterson, Valentin N. Todorow | 2011-11-29 |
| 8017526 | Gate profile control through effective frequency of dual HF/VHF sources in a plasma etch process | Edward P. Hammond, IV, Alexander Paterson, Brian K. Hatcher, Valentin N. Todorow, Dan Katz | 2011-09-13 |
| 7863060 | Method of double patterning and etching magnetic tunnel junction structures for spin-transfer torque MRAM devices | Tom Zhong, Witold Kula, Chyu-Jiuh Torng | 2011-01-04 |