Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8066895 | Method to control uniformity using tri-zone showerhead | Rodolfo P. Belen, Brian K. Hatcher, Dan Katz, Alexander Paterson, Valentin N. Todorow | 2011-11-29 |
| 8017526 | Gate profile control through effective frequency of dual HF/VHF sources in a plasma etch process | Rodolfo P. Belen, Alexander Paterson, Brian K. Hatcher, Valentin N. Todorow, Dan Katz | 2011-09-13 |