Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8058628 | Substrate processing apparatus and method | Marek Zywno | 2011-11-15 |
| 7933016 | Apparatus and methods for detecting overlay errors using scatterometry | Walter D. Mieher, Ady Levy, Boris Golovanevsky, Michael Friedmann, Ian Smith +10 more | 2011-04-26 |
| 7897942 | Dynamic tracking of wafer motion and distortion during lithography | Marek Zywno | 2011-03-01 |